Electronic Design

CMOS Acoustic MEMS Structure Yields On-Chip 8- to 12-GHz Resonator

Using a standard CMOS process, researchers have combined acoustic MEMS and other technology to create a >10-GHz on-chip resonator function for filters and VCOs. How standard CMOS process can be used ...
Electronic Design

Creating On-Chip MEMS Sensors in CMOS

Nanusens' novel approach to creating nanoscale sensor structures inside the CMOS layers. How the methodology helps shrink cost and size. Previously, MEMS sensors were created by employing proprietary ...