Abstract: The capacitive silicon micro-accelerometer as an important inertia device, applied in the autocar, consumer electronics, inertial guidance and so on, which has a wide application prospect.
Abstract: This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer that uses the principle of Fabry–Pérot (F-P) interference in conjunction with a micromechanical ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results