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As the semiconductor industry continues to miniaturize chip components—essential for computers, implantable drug dispensers, cell phones, and other devices—the demand for ever-more detailed information from Scanning Electron Microscope (SEM) images has grown. Although the exquisite, atomic-scale resolution of an SEM can’t be improved, researchers at NIST have begun a multi-year study to reduce uncertainties in the measurements inferred from SEM images. To do so, NIST physicist John Villarrubia a
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